EXT75DX Turbomolecular Pump by Edwards

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Product ID : B72241000

B72241000 EDWARDS EXT 75DX TURBO ISO 63 FLANGE TURBO INCLUDES CONTROLLER

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Description

The EXT75DX is a hybrid bearing compound turbo pump that combines the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board 24V controller allowing parallel and serial communication compatible with our TAG and TIC controllers. It is available with either aDN40NW, ISO63, DN63CF or an ISO100 inlet flange with an N2 pumping speed of up to 66ls-1. A basic pump system would require an EXT75DX pump, a TAG or TIC controller, either an air or water cooling accessory and a suitable backing pump.

Features

Compatible with TIC turbo and instrument controller
Multiple communication modes available including parallel mode, which allows traditional control signal interface and serial mode, which allows RS232 interface
Numerous user configurable parameters via RS232 interface including vent valve control settings, normal speed indication, stand-by running speed, programmable power settings, power consumption and pump temperature.
Enhanced monitoring capability including pump speed, power and temperature.

Specs

Technical Data
Inlet flange	DN63ISO-K, DN63CF, DN40NW or DN100ISO-K
Outlet flange	DN16NW
Vent/purge port	1/8 inch BSP
Pumping Speed ISO63/63CF (DN40NW)(ISO100) N2 He H2	61 ls-1 (42 ls-1) (66 ls-1) 57 ls-1 (49 ls-1) (59 ls-1) 53 ls-1 (48 ls-1) (54 ls-1)
Compression ratio: N2 He H2	1 × 1011 1 x 106 5 x 104
Recommended backing pump*	RV5/nXDS6i
Max continuous inlet pressure (light gas pumping)† water cooling (water at 15 °C, ambient temp at 40 °C) 2 × 10-2 mbar forced air cooled, 35 °C ambient 1 × 10-2 mbar	2 × 10-2 mbar 1 × 10-2 mbar
Pump rotational speed
Nominal rotational speed	90000 rpm
Standby rotational speed	Variable from 49500 to 90000 rpm (63000 rpm default)
Programmable power limit settings	Variable from 50-120W (80W default)
Analogue outputs	Rotational speed; Power consumption; Pump temp; Controller temp
Start time to 90% speed	110 s ‡
Ultimate Pressure (ISO/CF) RV backing pump Diaphragm backing pump	<5 x 10-9 / 5 x 10-10 <5 x 10-8 / 5 x 10-9
Cooling method#	Forced air / water
Ambient air temperature for forced air cooling	5 - 35 °C
Min cooling water flow rate (water 15 °C)	15 l h-1
Water temp range	10 - 20 °C
Max inlet flange temp	100 °C
Operating attitude	Vertical and upright, through to Horizontal
Noise level at 1 metre	<50 dB(A)
Max magnetic field pump can tolerate	5 mT
Recommended controller	TIC100
Quiescent electrical power	10 W

* A smaller backing pump may be used depending on application. A suitable diaphragm pump with ultimate <5 mbar may also be used e.g. XDD1.
† Above this inlet pressure, rotational speed drops to below nominal.
‡ Power limit set to 80 W.
# Air and water cooling accessories must be ordered separately

Dimensions

A - Manual vent valve in vent port
B - Podule
C - Logic interface connector
D - Backing port
E - Purge port (blanked off)
F - Interstage port (EXT75iDX only)
G - Podule connector socket
H - Earth connection